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Research Facilities

Working Room



  • Hume hood

  • High/low-temperature circulators

  • Vacuum desiccator with electric aspirator

  • Convection oven

  • Electric furnace

  • 2-bath electroplating system

  • Digital hotplate (chemical etching only)

  • Digitial hotplate/stirrer

  • Ultrasonic cleaner

  • Spin coater

  • Probe station

  • DC power supply

  • Digital multimeter

  • Contact angle meter

  • Infrared thermometer

  • LCR meter

Yellow Room



  • Photolithography system

  • Spin coater (photoresist only)

  • Digital hotplate (photoresist only)

  • Laminating machine (DFR only)

  • Imaging system equiped with microscope

  • Hume hood

  • Water purification system (Deionized water generator)

  • 3D profiling system

Clean Room​



  • Inductively coupled plasma (ICP) etcher

  • Thermal/E-beam evaporator

  • DC/RF magnetron sputtering system

  • Plasma enhanced chemical vapor deposition system (PECVD)

  • Reactive ion etching (RIE) system

  • Plasma ahser

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