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Research Topics

MEMS/NEMS

 

  • MEMS/NEMS design and simulation

  • Micro/nano-scale machining technologies & batch process

  • Micro/nano-scaled functional structures, devices, and platforms

  • Applications fields: RF, optic, bio etc. based on sensors and actuators

RF MEMS Devices

 

  • RF & structural design and simulation

  • Micromachining technologies and process design

  • Passive elements: RF MEMS switches, variable capacitors, filters, etc.

  • Integrated reconfigurable RF systems

MEMS Packaging

 

  • RF & structural design and simulation

  • Micromachining technologies and process design

  • Wafer-level RF MEMS packaging

Stretchable Electronics

 

  • Synthesis of conductive nanomaterials and composites

  • Soft lithography & transfer-printing techniques

  • Stretchable conductors

  • Elastomeric strain sensors, pressure sensors, tactile sensor arrays

Functional Nanomaterials

 

  • Synthesis and growth of functional nanomaterials/structures

  • Nanofabrication and process integration techniques

  • Applications to stretchable electronics, photovoltaic & electrical devices

Smart Surface Texturing

 

  • Micro/Nano-scale fabrication technologies

  • Nature-inspired fucntional surfaces

  • Flexible and transparent superhydrophobic films

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